Waferpedia

Comparison ledger

200versus1000 Hot Plate

Blue M 200, CEE 1000 Hot Plate, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
200Blue M
OEMBlue MCEE
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 200CEE 1000 Hot Plate
Specifications
Temperature range200°C to 437°C[1]—
Configuration—4"[2]
Type—Hot Plate[2]
Wafer Size—4 inch[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]snfguide.stanford.edusnfguide.stanford.edu
  2. [2]inventory listing