Comparison ledger
Blue M 0 V 500, MKS FI 20160 1 Microwave, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0 V 500Blue M | |
|---|---|---|
| OEM | Blue M | MKS |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Blue M 0 V 500 | MKS FI 20160 |
| Specifications | ||
| Phase | — | SmartPower series - 3.0 kW - Liquid-cooled - 200–208 VAC, 3-phase - Remote / DeviceNet control[1] |
| Voltage | — | 208 V[1] |
| Configuration | — | 20 A[1] |
| Power | — | 3.0 kW[1] |
| Cooling | — | Liquid-cooled[1] |
| Current | — | 20 A[1] |
| Frequency | — | 50/60 Hz[1] |
| Control | — | Remote / DeviceNet[1] |
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