Waferpedia

Comparison ledger

0 V 500versus1913 MKIII

Blue M 0 V 500, Heller 1913 MKIII, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 V 500Blue M
OEMBlue MHeller
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 V 500Heller 1913
Cited variants—
Specifications
Configuration—Removed:[3]
Heated zones—13[2]
Cool zones—3[2]
Heated length—3560 mm[2]
Oven length—5900 mm[2]
Maximum PCB width—55.9 cm (22") / optional 61 cm[2]
Maximum working temperature—350°C (optional 400°C)[2]
Process gas options—Air, Nitrogen[2]
Cleanroom option—Class 1000[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]hellerindustries.comhellerindustries.com
  3. [3]inventory listing