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NV GSD HE MeV Ionversus160 XP Ion

Axcelis NV GSD HE MeV Ion, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
NV GSD HE MeV IonAxcelis
160 XP IonVarian
OEMAxcelisVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis NV GSD HE MeV IonVarian 160 XP Ion
Specifications
Configuration—150mm High Current IMP[1]
OEM—Varian[2]
Model—160 XP Ion[2]
Category—Ion Implantation[1]
Tool type—ion implanter[1]
NV GSD HE MeV Ion entry160 XP Ion entryAsk about these tools →Share experience with this comparison →

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Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing