Waferpedia

Comparison ledger

SERV.481.27891 ACC Controller AIversus11600 SRD

ASML SERV.481.27891 ACC Controller AI, Semitool 11600 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
11600 SRDSemitool
OEMASMLSemitool
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyASML SERV.481.27891 ACC Controller AISemitool 11600 SRD
Specifications
ConfigurationNew stock ASML sealed part[1]Ceramic[3]
OEMASML[1]—
ModelSERV.481.27891 ACC Controller AI[1]11600 SRD[3]
CategoryWet Processing / Clean[2]—
Stock conditionNew stock[1]—
Part conditionASML sealed part[1]—
Handling noteCleanroom open only[1]—
Manufacturer—Semitool[3]
Equipment type—Spin Rinse Dryer[3]

Plan your fab

Building a Wet Processing / Clean process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing