Comparison ledger
Applied Materials P5000, Temescal SuperSweep64, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | P5000Applied Materials | SuperSweep64Temescal |
|---|---|---|
| OEM | Applied Materials | Temescal |
| Category | Deposition | Deposition |
| Wafer size | 150mm | 150mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2005 Third-party support only |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials P5000 | Temescal SuperSweep64 |
| Specifications | ||
| Process type | Dielectric PECVD[1] | — |
| Dedicated chambers | Two[1] | — |
| Silicon dioxide chemistry | TEOS/O2[1] | — |
| Silicon nitride chemistry | SiH4/NH3 capable[1] | — |
| Maximum wafer size | 8 inches[1] | — |
| Film thickness | Multiple microns thick[1] | — |
| Nominal operating temperature | ~400C[1] | — |
| Number of chambers | 2[1] | — |
| Chemistry for silicon dioxide | TEOS/O2[1] | — |
| Chemistry for silicon nitride | SiH4/NH3[1] | — |
| Deposited film thickness | Multiple microns[1] | — |
| Operating temperature | ~400°C[1] | — |
| controller type | — | programmable beam sweep controller[2] |
| system association | — | listed under the FC-4400 system's electron beam source, power supply, and sweep section[2] |
| wafer capacity referenced in associated system | — | 30 150 mm wafers per load[2] |
| Type | — | programmable beam sweep controller[2] |
| Operation | — | fully digital operation[3] |
| Internal waveform storage | — | up to 64 patterns[3] |
| Addressable points | — | 1024[3] |
| Waveform types | — | sine, triangle, saw-tooth, clipped, and arbitrary[3] |
| Frequency range | — | 1 to 200 Hz[3] |
| Max. sweep current | — | -4 A to +4 A[3] |
| Power requirements | — | 100–240 V ac, 50–60 Hz[3] |
| Computer I/O ports | — | RS-232 and RS-485[3] |
| Compatible system | — | Temescal FC-4400 deposition system[4] |
| Compatibility | — | Compatible with almost any commercially available e-beam gun[5] |
| Waveform resolution | — | 8 bits (0.4%)[5] |
| Weight | — | 10 lbs[5] |
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