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Comparison ledger

0041-39086 ESC PartversusDPS II CIP

Applied Materials 0041-39086 ESC Part, Applied Materials DPS II CIP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
DPS II CIPApplied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Applied Materials DPS
Specifications
Configuration—4x (D4) SILICON DPS II chamber, 12 Gas line (Standard Gas Line)[1]
Applicable—2 Chiller[1]
Not applicable—Scrubber, Dry Pump[1]
OEM—Applied Materials[1]
Model—DPS II CIP[1]
Category—Etch[2]
Tool type—Etcher[2]
Chamber—4x (D4) SILICON DPS II chamber[1]
Gas line—12 Gas line (Standard Gas Line)[1]
Chiller—2 Chiller applicable[1]
Scrubber—Not applicable[1]
Dry pump—Not applicable[1]
Vintage—2005[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com