Waferpedia

Comparison ledger

0041-39086 ESC PartversusCentura Super E

Applied Materials 0041-39086 ESC Part, Applied Materials Centura Super E, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
Centura Super EApplied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Applied Materials Centura
Specifications
Configuration—3 Chamber Super E Positions a,b, and C[1]
Wafer size—8 inch[1]
Number of chambers—3 Chamber Super E Positions a,b, and C[1]
Loadlock type—Wide Body Loadlocks[1]
Vintage—1997[1]

Plan your fab

Building a Etch process? Get a complete equipment list.

Open the fab equipment planner →
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing