Waferpedia

Comparison ledger

0020 23839 PartversusOpAL

Applied Materials 0020 23839 Part, Oxford Instruments OpAL, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 23839 PartApplied Materials
OpALOxford Instruments
OEMApplied MaterialsOxford Instruments
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 23839 PartOxford Instruments OpAL
Specifications
ConfigurationPlate, Sensor Clamp, Hdpcvd Ultima +[1]Single open loop chamber (non-loadlocked)[2]
Heated table—80-300ºC[2]
Voltage—208V, 3Ph, 60Hz, 25A[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing