Comparison ledger
Applied Materials 0010 47763, Lam Research 4520 XL, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010 47763Applied Materials | 4520 XLLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010 47763 | Lam Research Rainbow 4520 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | 2nd Source New[2] | PC functions but fan needs changing[5] |
| Type | Monopolar Dual Heated[3] | — |
| Description | ASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[4] | — |
| Possible Materials | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[3] | — |
| Model | 0010-47763[2] | 4520 XL[5] |
| OEM | Applied Materials[2] | — |
| Material (possible) | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[3] | — |
| Application | Fixing wafers in etching process (PVD, CVD, ETCH)[3] | — |
| Quantity available (source) | 1[3] | — |
| Software Version | — | E1.6.1-002[5] |
| Main UI (No PC Remote) | — | Pentium 33 NextStep[5] |
| Manufacturer | — | Lam Research[5] |
| Category | — | Etch[6] |
| Wafer sizes | — | 8 inch[5] |
| Main UI | — | Pentium 33 NextStep[5] |
| PC status | — | PC functions but fan needs changing[5] |
| Process application | — | Contact etch, planarization, via etch, trench mask etch, pad etch[7] |
| Operating pressure | — | 30-200 mtorr[7] |
| Aspect ratio | — | 5:1 or greater[7] |
| Selectivity | — | ≥ 50:1 for contact and ≥ 30:1 for via etch[7] |
| BPSG etch rate | — | >8000 A/min[7] |
| TEOS etch rate | — | >6000 A/min[7] |
| Uniformity | — | +/- 7% 3σ[7] |
| Selectivity BPSG/TEOS to poly | — | > 30:1[7] |
| Particles | — | <0.06/cm2 at >0.3μm size[7] |
| Uptime | — | ≥ 85%[7] |
| MTTC | — | < 6 hours[7] |
| MTBF | — | ≥ 125 hours[7] |
| MTTR | — | ≤ 4 hours[7] |
| Feature | — | Multifrequency diode[7] |
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