Waferpedia

Comparison ledger

0010 47763versusP 5000 MxP+

Applied Materials 0010 47763, Applied Materials P 5000 MxP+, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010 47763Applied Materials
P 5000 MxP+Applied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010 47763Applied Materials P 5000 MxP+
Specifications
Configuration2nd Source New[1]Chamber A:[4]
TypeMonopolar Dual Heated[2]—
DescriptionASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[3]—
Possible MaterialsAl2O3 (aluminum oxide) or AlN (aluminum nitride)[2]—
Model0010-47763[1]P 5000 MxP+[4]
OEMApplied Materials[1]Applied Materials[5]
Material (possible)Al2O3 (aluminum oxide) or AlN (aluminum nitride)[2]—
ApplicationFixing wafers in etching process (PVD, CVD, ETCH)[2]—
Quantity available (source)1[2]—
Voltage—208 V, 125.0 A, 50/60 Hz, 3 Phase[4]
Largest Load Ampere Rating—125 Amps[4]
MAximum Ampere Rating—90 KVA[4]
Full Load Current—250 Amps[4]
Interrupt Current—10,000 Amps I.C.[4]
Wafer Set Size—8"[4]
Chamber A—MxP+ Etch[4]
Chamber B—MxP+ Etch[4]
Chamber C—MxP+ Etch[4]
RF Generator—OEM 12 B[4]
Baraton—1 Torr[4]
Slit Valve—Standard[4]
Baratron—1 Torr[4]
Make—Applied Materials[4]
Category—Etcher[4]
Wafer sizes—8, 6 inch[4]
Wafer set size—6"[5]
Chamber A RF generator—OEM 12 B[4]
Chamber B RF generator—OEM 12 B[4]
Chamber C RF generator—12 B[4]
Electrical requirement—Line voltage 200/208 V[4]
Mainframe type—Standard[4]
Robot type—MK II[4]
Load lock cassette—Manual 2 Cassette[4]
Storage elevator—15 slots[4]
Power rack—Shrink[4]
Line Frequency—50/60 Hz[4]
Line Voltage—200/208 V[4]
Line Amperage—123 Amps[4]
3rd Monitor—Penulator[4]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]saulcontrol.comsaulcontrol.com
  3. [3]getspares.comgetspares.com
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]waferpedia.comwaferpedia.com