Comparison ledger
Applied Materials 0010 47763, Applied Materials eMax CT Plus Dielectric, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010 47763Applied Materials | eMax CT Plus DielectricApplied Materials |
|---|---|---|
| OEM | Applied Materials | Applied Materials |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010 47763 | Applied Materials eMax |
| Specifications | ||
| Configuration | 2nd Source New[1] | Alcatel ATH 1600 M Turbo Pump[4] |
| Type | Monopolar Dual Heated[2] | — |
| Description | ASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[3] | — |
| Possible Materials | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[2] | — |
| Model | 0010-47763[1] | — |
| OEM | Applied Materials[1] | — |
| Material (possible) | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[2] | — |
| Application | Fixing wafers in etching process (PVD, CVD, ETCH)[2] | — |
| Quantity available (source) | 1[2] | — |
| Bias | — | 13.5 MHz (Bias) & 2 MHz (LF Bias)[4] |
| LF Bias | — | Daihen RMN-50N1[4] |
| Source | — | Daihen AMN-30 H 60 MHz[4] |
| Gate Valve | — | Nor-Cal / NC-95-PP[4] |
| FIB | — | eFib, wFib[4] |
| Turbo Pump | — | Alcatel ATH 1600 M[4] |
| RF Match Box | — | Included[4] |
| RF Generator | — | Included[4] |
| Chamber Equip Cart | — | Included[4] |
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