Waferpedia

Comparison ledger

0010-21246 Partversus7300

Applied Materials 0010-21246 Part, Zygo 7300, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
7300Zygo
OEMApplied MaterialsZygo
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Zygo 7300
Cited variants—
  • NewView 7200[1]
Specifications
Scan Speed—≤135 µm/sec[2]
System Zoom—Auto; multi (3 pos)[2]
Max Scan Range—≤20 mm[2]
Objectives—From 1X to 100X[2]
Max Field of View—14 mm standard; 22 mm optional (with megapixel camera)[2]
Turret Options—Motorized or Manual (6 Position)[2]
Z Stage—Motorized (100 mm travel)[2]
X-Y Stages—Manual (100 mm travel) or Motorized (150 mm travel)[2]
Tip/Tilt Stage—Manual or Motorized[2]
Encoded Z, X-Y Stage—Yes (optional)[2]
Measurement Principle—Scanning white light interferometry (SWLI)[2]
Height Resolution—0.1 nm[2]
Model—7300[3]
Make—Zygo[3]
Category—Laboratory Equipment[4]
Type—3D optical surface profiler / profilometer[1]
Measurement principle—Scanning white light interferometry[1]
Measurement method—Scanning white light interferometry (SWLI)[2]
Sources (4)Every fact above is drawn from these public sources
  1. [1]manualslib.commanualslib.com
  2. [2]lambdaphoto.co.uklambdaphoto.co.uk
  3. [3]Equipment inventory listing
  4. [4]manualslib.commanualslib.com