Comparison ledger
Applied Materials 0010-13622 RF Match for, Trion Titan Loadlock, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13622 RF Match forApplied Materials | Titan LoadlockTrion |
|---|---|---|
| OEM | Applied Materials | Trion |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13622 RF Match for | Trion Titan Loadlock |
| Specifications | ||
| Configuration | High Efficiency HE RF Match-Bias[1] | Without dry pumps and lower electrode chiller[2] |
| Model | 0010-13622[1] | — |
| Product Type | RF Match for PVD (Physical Vapor Deposition)[1] | — |
| Feature | High Efficiency HE RF Match-Bias[1] | — |
| Turbo pump | — | Edwards STPA 1303 C[2] |
| Wafer sizes | — | 3 inch[2] |
| Control | — | PLC and touch screen control[2] |
| Substrate temperature control | — | Active[2] |
| Vacuum cassette elevator | — | Yes[2] |
| Chillers | — | Neslab chillers[2] |
| Configuration note | — | Without dry pumps and lower electrode chiller[2] |
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