Comparison ledger
Applied Materials 0010-13622 RF Match for, Temescal 1CK, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13622 RF Match forApplied Materials | 1CKTemescal |
|---|---|---|
| OEM | Applied Materials | Temescal |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13622 RF Match for | Temescal 1CK |
| Cited variants | — | |
| Specifications | ||
| Configuration | High Efficiency HE RF Match-Bias[2] | — |
| Model | 0010-13622[2] | 1CK SuperSource[1] |
| Product Type | RF Match for PVD (Physical Vapor Deposition)[2] | — |
| Feature | High Efficiency HE RF Match-Bias[2] | — |
| Rated power | — | up to 8 kW[1] |
| Power rating | — | 1–8 kW[1] |
| Drive options | — | Side drive or bottom drive[1] |
| Crucible configurations | — | 4 x 7 cc pockets; 6 x 4 cc pockets[1] |
| Weight | — | 23.5 lbs. (10.7 kg)[1] |
| Rotation torque | — | 10 in. lbs. (11.5 kg·cm)[1] |
| Max bakeout temperature | — | 302 °F (150 °C)[1] |
| Acceleration voltage | — | 4–10 kV[1] |
| Operating pressure maximum | — | 5 x 10^-4 torr (6.7 x 10^-4 mbar)[1] |
| Operating pressure minimum | — | 1 x 10^-4 torr (1.33 x 10^-4 mbar)[1] |
| Beam deflection | — | 270°[1] |
| Spot size/shape | — | From tight oval to diffuse oblong[1] |
| Evaporation rate reference | — | 25 kÅ of aluminum at 10-in. (254-mm) source-to-substrate distance[1] |
| Sweep capability | — | Longitudinal and lateral when operated with a beam sweep controller[1] |
| Filament current | — | 70 A at 12 V ac[1] |
| Emission current | — | 0–1.5 A at 4–10 kV dc (8 kW max.)[1] |
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