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Comparison ledger

0010-13622 RF Match forversusIBD

Applied Materials 0010-13622 RF Match for, Oxford Instruments IBD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
IBDOxford Instruments
OEMApplied MaterialsOxford Instruments
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13622 RF Match forOxford Instruments IBD
Cited variants—
  • Oxford IBD Chamber (Ion Beam Deposition) with hollow cathode DC ion source[1]
  • Oxford IBD Chamber (Ion Beam Deposition) with RF gridded ion source[2]
Specifications
ConfigurationHigh Efficiency HE RF Match-Bias[3]with hollow cathode DC ion source[1]
Model0010-13622[3]—
Product TypeRF Match for PVD (Physical Vapor Deposition)[3]—
FeatureHigh Efficiency HE RF Match-Bias[3]—
Technology—Ion Beam Deposition[1]
Ion Source (configurable)—Hollow cathode DC ion source or RF gridded ion source[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]inventory listing