Waferpedia

Comparison ledger

0010-03485 Magnet Assyversus320 PC

Applied Materials 0010-03485 Magnet Assy, STS 320 PC, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
OEMApplied MaterialsSTS
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-03485 Magnet AssySTS 320 PC
Specifications
ConfigurationWP AL 300mm PVD[1]—
OEMApplied Materials[1]—
Model0010-03485[1]—
DescriptionMAGNET ASSY, WP AL 300MM PVD[2]—
ProcessPVD[3]—
Wafer size300mm[4]—
VersionSpares[4]—
Part Number0010-03485[1]—
ManufacturerApplied Materials[1]—
Process TypePVD (Physical Vapor Deposition)[1]—
Application (Material)Aluminum (AL)[1]—
Wafer Diameter (associated)300 mm[1]—
Type—Fully automatic computer controlled reactive ion etching system[5]
End point detection—Included[5]
Cathode diameter—30 cm[5]
Cathode area—706.5 cm2[5]
RF forward power range—10 to 600 watts[5]
Chamber max pressure—500 mTorr[5]
Substrate sizes—2 to 8 inch and small fragments[5]
Process gases—SF6, CHF3, C3F8, He, CF4, O2, and N2[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]layla-ec.comlayla-ec.com
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]mp.aau.dkmp.aau.dk