Waferpedia

Comparison ledger

0010-03254 E ChuckversusEnvironmental

Applied Materials 0010-03254 E Chuck, Tenney Environmental, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsTenney
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Tenney Environmental
Specifications
Temperature Range—-62 to +82°C (Tenney #1)[1]
Temperature Stability—±1°C at steady state (Tenney #1)[1]
Temperature Accuracy—±0.5°C internal sensor (Tenney #1)[1]
Humidity Range—20% to 95% relative humidity (Tenney #1)[1]
Humidity Stability—±5% at steady state (Tenney #1)[1]
Humidity Accuracy—±0.5% internal sensor (Tenney #1)[1]
Interior Volume—234 cubic feet (72" wide × 72" deep × 78" tall) (Tenney #1)[1]
Control System—VersaTenn V microprocessor with PID control (Tenney #1)[1]
Cooling System—Two-stage refrigeration system (Tenney #1)[1]
Heating System—Electric resistance heaters (Tenney #1)[1]
Product type—Environmental test chambers and walk-in rooms[2]
Testing capabilities—Temperature, humidity, altitude, vibration, and vacuum testing[2]
Walk-in chamber use—Large walk-in enclosure used to test equipment under simulated environmental conditions[1]
Temperature range—-62 to +82°C[1]
Temperature stability—±1°C (at steady state)[1]
Temperature accuracy—±0.5°C (internal sensor)[1]
Humidity range—20% to 95% relative humidity[1]
Humidity stability—±5% (at steady state conditions)[1]
Humidity accuracy—±0.5% (internal sensor)[1]
Interior volume—234 cubic feet (72" wide × 72" deep × 78" tall)[1]
Control system—VersaTenn V microprocessor control system with PID temperature and humidity control[1]
Automation—Completely automatic[1]
Logging—Internal log function keeps a continuous record of chamber temperature and humidity[1]
Programmable profiles—Allows preprogrammed temperature/humidity profiles[1]
Additional test capabilities—Liquid, freezing, and precipitation tests[1]
Altitude chamber size range—5 to 64 cubic feet[2]
Altitude chamber temperature range—-68°C to +177°C[2]
Altitude chamber humidity capability—20% to 95% RH in the dry bulb range of +20°C to +85°C, limited by a 5°C dewpoint[2]
Altitude conditions—Site level to 100,000 feet[2]
Combined temperature and altitude—60,000 feet maximum[2]
Altitude chamber control—±0.3°C and ±2% RH[2]
Sources (2)Every fact above is drawn from these public sources
  1. [1]weather.govweather.gov
  2. [2]tenney.comtenney.com