Comparison ledger
AJA ATC 1500 F, AJA ATC 2036 E, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ATC 1500 FAJA | ATC 2036 EAJA |
|---|---|---|
| OEM | AJA | AJA |
| Category | Deposition | Deposition |
| Wafer size | — | 15-20” adjustable length from source to wafer |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | AJA ATC | AJA ATC |
| Specifications | ||
| Configuration | Substrate size up to 3”[1] | Temescal Multu-Pocket Rotary E-Beam Source[2] |
| Wafer size | — | 15-20” adjustable length from source to wafer[2] |
| Chamber Front | — | Double hinged door with locking mechanism[2] |
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