Comparison ledger
Agilent Cary 50 Scan Spectrophotometer, Agilent Cary 5000 UV-VIS-NIR Spectrophotometer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | Agilent | Agilent |
| Category | Metrology & Inspection | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Agilent Cary | Agilent Cary |
| Specifications | ||
| Configuration | Scan speeds up to 24000nm per min.[1] | Refurbished[4] |
| Voltage | 115 V[1] | — |
| Make | Agilent / Varian[1] | — |
| Model | Cary 50 Scan[1] | — |
| Instrument type | UV-Vis spectrophotometer[2] | — |
| Optics | Single Beam[2] | — |
| Maximum scan speed | 24,000 nm/min[1] | — |
| Bandwidth | Fixed at 1.5 nm[2] | — |
| Photometric range | ±3.3 Abs[2] | 8 Abs[5] |
| Weight | 21 kg[2] | — |
| Dimensions (W x D x H) | 500 mm x 590 mm x 205 mm[2] | — |
| Power requirements | +5 V DC <1 A, +12 V DC <1.5 A, -12 V DC <0.25 A[2] | — |
| Control software | Cary WinUV software[2] | — |
| Light source | Xenon flash lamp[2] | — |
| Wavelength range | 190-1100 nm[2] | — |
| Scan speed | Up to 24,000 nm/min[2] | — |
| Spectral bandwidth | Fixed at 1.5 nm[2] | 0.01 nm[4] |
| Data collection rate | 80 points per second[2] | — |
| Power consumption | Maximum 26 W from host PC power supply[2] | — |
| Stray light | ≤1% at 198 nm (KCl), ≤0.05% at 220 nm (NaI), ≤0.05% at 370 nm (NaNO2)[2] | — |
| Range | — | 185 ~3,300 nm[4] |
| Options | — | 2 set of 150 mm diameter integrating sphere[4] |
| Spectral range | — | 175 nm to 3300 nm[5] |
| Spectral range (alternate source) | — | 185 nm to 3300 nm[4] |
| Optical design | — | Double-beam, double-grating[4] |
| Integrating sphere options | — | External DRA-2500 (200 nm to 2500 nm) and Internal DRA-2500 (200 nm to 2500 nm) with PMT/PbS detectors[4] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →