Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Neslab Thermoflex 10000 Chiller, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Thermoflex 10000 ChillerNeslab | |
|---|---|---|
| OEM | ABM | Neslab |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Neslab Thermoflex 10000 Chiller |
| Cited variants | — | |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[2] | — |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Temperature range | — | +5°C to +40°C[3] |
| Cooling capacity | — | 10,000W/34100 btu/hr at 20°C[3] |
| Reservoir volume | — | 4.75 gals[3] |
| Pump | — | 3.5 gpm at 50 psi[3] |
| Voltage | — | 208V, 3 Ph, 60 Hz[3] |
| Cooling capacity at 20°C | — | 10,000 W (34,100 BTU/hr)[3] |
| Pump flow rate (standard pump) | — | 3.5 gpm at 50 psi[3] |
| Pump flow rate (P3 pump at 20°C / 32 PSI) | — | 10 GPM[1] |
| Pump flow rate (P5 pump at 20°C / 60 PSI) | — | 20 GPM[1] |
| Power requirement (option 1) | — | 208V, 3 Ph, 60 Hz[3] |
| Power requirement (option 2) | — | 460 VAC, 16.0 A, 60 Hz[4] |
| Power requirement (option 3) | — | 200-230V, 1Ph or 3Ph[1] |
| Cooling system | — | Air-cooled or water-cooled refrigeration with heat exchanger[4] |
| Control type | — | Microprocessor-based controller for temperature regulation and alarms[4] |
| Power Requirement (source 1) | — | 208 V, 3-phase, 60 Hz[3] |
| Power Requirement (source 2) | — | 460 VAC, 16.0 A, 60 Hz[4] |
| Available Voltage Options | — | 200-230 V single-phase or three-phase[1] |
| Cooling Options | — | Air or water[1] |
| Controller | — | Microprocessor-based[4] |