Comparison ledger
Tokyo Electron NS 300 Z Wafer, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NS 300 Z WaferTokyo Electron | 1000FPYES |
|---|---|---|
| OEM | Tokyo Electron | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tokyo Electron NS 300 | YES 1000FP |
| Specifications | ||
| Software Version | 6.00.26.2[1] | — |
| System Power Rating | 208 AC, 3 Phase[1] | — |
| Configuration | 4 Load Port[1] | — |
| System type | — | Plasma cleaning system[2] |
| Line | — | R-Series Plasma Cleaning Systems (Glen Technologies)[2] |
| Model | — | Glen/YES 1000FP[2] |
| Designed use | — | Designed to accept a range of shelf sizes[2] |
| Application focus | — | Changing needs of the flat panel industry[2] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →