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Comparison ledger

Mark 8versus1000 Family

Tokyo Electron Mark 8, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
Mark 8Tokyo Electron
1000 FamilyUltratech
OEMTokyo ElectronUltratech
CategoryLithographyLithography
Wafer sizeParallel wafer flow processing software option (simultaneous coat & develop)—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones1992 Vintage · 1993 Vintage · 1996 Vintage · 1998 Vintage—
Control system——
Generation——
FamilyTokyo Electron MarkUltratech 1000 Family
Cited variants
  • Tel Mark 8 Developer[1]
  • Tel Mark 8 Coater[2]
  • Tel MARK 8[3]
  • Mark 8 Developer[1]
  • Mark 8 Coater[2]
  • Mark 8[4]
  • Mark 8 Coater (6 inch)[2]
  • Mark 8 Coater (8 inch)[5]
  • Mark 8 SOGT[3]
  • Mark 8 Coater/Developer[4]
—
Specifications
ConfigurationSOGT[3]—
Wafer sizeParallel wafer flow processing software option (simultaneous coat & develop)[4]—
Wafer Size6 inch, 8 inch[1]—
ConfigurationsDeveloper, Coater, Coater/Developer[1]—
Vintages1992, 1993, 1996, 1998[2]—
Coater/Developer Configuration Details2 coater / 2 developer - Cassette platforms (4) - Coat Modules (2) - Hot Plates (8) - Chill Plates (9) - Wash Disk system (WDS) - A two block system / two robots - Parallel wafer flow processing software option (simultaneous coat & develop) - Semifab CD 200+4TEL Temperature & Humidity Unit - Chemical cabinet containing SMC INR-244-117B Thermocons[4]—
MakeTel[4]—
ModelMark 8[4]—
Wafer sizes6 inch[2]—
Cassette platforms4[4]—
Coat modules2[4]—
Hot plates8[4]—
Chill plates9[4]—
Wash disk systemWDS[4]—
Robots2[4]—
Software optionParallel wafer flow processing software option (simultaneous coat & develop)[4]—
Temperature & humidity unitSemifab CD 200+4TEL Temperature & Humidity Unit[4]—
Chemical cabinet contentsSMC INR-244-117B Thermocons[4]—
Bulk developer chemical mix stationAvailable for this system[4]—
Tool type—Photolithography step-and-repeat 1X stepper[6]
Optical design—Wynne Dyson[6]
Magnification—1X[6]
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Sources (6)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing
  6. [6]en.wikipedia.orgen.wikipedia.org