Comparison ledger
Tokyo Electron Clean Track Act 12, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Clean Track Act 12Tokyo Electron | 1000PYES |
|---|---|---|
| OEM | Tokyo Electron | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | Tokyo Electron Clean Track | YES 1000P |
| Cited variants | — | |
| Specifications | ||
| Configuration | Single Block[2] | Parallel plate[5] |
| Block configuration | Single Block[2] | — |
| Coating units | 2[2] | — |
| Developing units | 2[2] | — |
| Air supply accessory (variants) | Shinwa ESA CFCP-8-00; Shinwa T&H ESA-8-F-02[2] | — |
| Power box model | PB121-I150-YA-L1T, 200-200V/3ph/50~60Hz[3] | — |
| Solvent distribution station | 2-Door Stainless Steel[3] | — |
| Recirculating temperature controller | SMC Thermo-Con Model INR-244-265A-3004-X17, 200V/3ph/60Hz; PolyScience DuraChill Model DCA304D1, 200-230V/3ph/50-60Hz[3] | — |
| Air supply system | Shinwa Model T&H-ESA-2S-T-01, 200-230V/3ph/50-60Hz[3] | — |
| Equipment type | Coater / Developer[2] | — |
| OEM | Tokyo Electron[1] | — |
| Model | Clean Track Act 12[2] | 1000P[4] |
| Developers | 2[2] | — |
| Associated air supply system | Shinwa T&H ESA-8-F-02 Temperature and Humidity Controlled Air Supply System[2] | — |
| Associated temperature and humidity controlled air supply system | Shinwa Model T&H-ESA-2S-T-01 Temperature and Humidity Controlled Air Supply System[3] | — |
| System type | — | Plasma cleaning system[4] |
| Shelf configuration | — | Four 16 x 16 inch shelves[4] |
| Total capacity | — | 1024 square inches[4] |
| Control system | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[4] |
| Number of shelves | — | 4[4] |
| Shelf size | — | 16 x 16 inches[4] |
| Power | — | 1000 W[5] |
| Operation modes | — | Active, RIE, Downstream[4] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[4] |
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