Comparison ledger
Tokyo Electron Alpha 805, Tokyo Electron Alpha 805 D, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Alpha 805Tokyo Electron | Alpha 805 DTokyo Electron |
|---|---|---|
| OEM | Tokyo Electron | Tokyo Electron |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tokyo Electron Alpha 805 | Tokyo Electron Alpha 805 |
| Specifications | ||
| Process | Dry Ox[1] | — |
| OEM | Tokyo Electron[1] | — |
| Model | Alpha 805[1] | Alpha 805 D[3] |
| Category | Thermal / Diffusion[2] | Thermal / Diffusion[4] |
| Wafer size | 8 inch[1] | 8 inch[3] |
| Configuration | — | PIQ[3] |
| Manufacturer | — | Tokyo Electron[4] |
| Equipment type | — | Furnace[3] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →