Waferpedia

Comparison ledger

SB8Eversus10100

SUSS MicroTec SB8E, West Bond 10100, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SB8ESUSS MicroTec
10100West Bond
OEMSUSS MicroTecWest Bond
CategoryPackaging & BondingPackaging & Bonding
Wafer size150mm—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control systemWindows NT—
Generation——
FamilySUSS MicroTec SB8EWest Bond 10100
Specifications
Tool typeVAC substrate bonder[1]—
Maximum wafer sizeup to 150mm[1]—
Vacuum leveldown to 5x10e-5 mbar[1]—
Overpressureup to 3 bar[1]—
Bonding processesAnodic Bonding, Silicon Fusion Bonding, Adhesive Bonding, Thermal Compression Bonding[1]—
HeatingDouble-side heating up to 550 Degrees Celsius[1]—
Power supply0 to +/- 2000 VDC with maximum current at 15mA[1]—
Control software platformWindows NT[1]—

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Sources (1)Every fact above is drawn from these public sources
  1. [1]cnfusers.cornell.educnfusers.cornell.edu