Comparison ledger
SUSS MicroTec MA 8 BA 8 Gen 5 S Compact Mask, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MA 8 BA 8 Gen 5 S Compact MaskSUSS MicroTec | 1000 FamilyUltratech |
|---|---|---|
| OEM | SUSS MicroTec | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SUSS MicroTec MA 8 Mask | Ultratech 1000 Family |
| Cited variants |
| — |
| Specifications | ||
| Configuration | For imprint processing[1] | — |
| Power supply | 3x 400V AC + N + PE / 50-60Hz[1] | — |
| Max fuse rating machine | 30amp[1] | — |
| Max fuse rating facility | 40amp[1] | — |
| Connection cable | 5x AWG8 length 16ft / 5m open end, no connector[1] | — |
| Outer tube diameter | 6mm[1] | — |
| Max length | 2m[1] | — |
| According to purity level ISO 8573-1 | 2010, [5:6:4][1] | — |
| CDA Consumption | ca. 1 m3/h (LH350)[1] | — |
| AIC or main interrupt and breakers | 15 kA IEC[1] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[2] |
| Optical design | — | Wynne Dyson[2] |
| Magnification | — | 1X[2] |
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