Comparison ledger
SUSS MicroTec MA 150, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MA 150SUSS MicroTec | 1000 FamilyUltratech |
|---|---|---|
| OEM | SUSS MicroTec | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 1995 1995 vintage · 2012 Third-party support only | — |
| Control system | — | — |
| Generation | — | — |
| Family | SUSS MicroTec MA 150 | Ultratech 1000 Family |
| Cited variants | — | |
| Specifications | ||
| Voltage | 230 V[2] | — |
| Configuration | 3200 VA[2] | — |
| Frequency | 50 Hz[2] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[3] |
| Optical design | — | Wynne Dyson[3] |
| Magnification | — | 1X[3] |
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