Comparison ledger
SUSS MicroTec ACS 300 Gen 2, YES 450 PB 12 Polyimide, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ACS 300 Gen 2SUSS MicroTec | |
|---|---|---|
| OEM | SUSS MicroTec | YES |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | 300mm | 300mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SUSS MicroTec ACS 300 | YES 450 |
| Specifications | ||
| Configuration | Includes:[1] | Preheated N, (Process Gas)[4] |
| Wafer size | System tooling for 200/300 mm semi spec wafer sizes[1] | Capacity is two 25 wafer cassettes in a batch process (50 wafers at a time) - 300mm FOUP[4] |
| OEM | SUSS MicroTec[2] | YES[4] |
| Model | ACS 300 Gen 2[3] | 450 PB 12[4] |
| Equipment type | Coater / Developer[1] | — |
| Automation | fully automatic[2] | — |
| Architecture | modular[2] | — |
| Process modes | spin-coating and spray-coating[2] | — |
| Integrated functions | coat, bake, and develop modules[1] | — |
| Chamber Material | — | 316L Stainless Steel[4] |
| Operation Temperature | — | ambient to 450°C (option high temp version: Ambient to 550°()[4] |
| Process Gas Inputs | — | 1 standard up to 3 optional[4] |
| Mass Flow Controllers | — | optional, up to 3[4] |
| Laminar Flow Filter | — | 100 micron Mott'" plate filter[4] |
| Cleanliness | — | particle reduction in most applications[4] |
| Category | — | Thermal / Diffusion[5] |
| Capacity | — | Two 25-wafer cassettes in a batch process (50 wafers at a time)[4] |
| FOUP compatibility | — | 300mm FOUP[4] |
| Wafer handling | — | Uses wafer cassette; wafers are manually brought to the machine and loaded inside[4] |
| Operation temperature | — | Ambient to 450°C[4] |
| Gas delivery | — | 1 standard up to 3 optional[5] |
| Process gas | — | Preheated N2[4] |
| Vacuum | — | Alternate vacuum valve for process vacuum[5] |
| Vacuum plumbing | — | VCR[5] |
| Number of Recipes | — | 8 temperature profiles (up to 200 with YES - DAQ-LR option)[4] |
| Temperature | — | Ambient to 450°C with LED temperature and set point displays[4] |
| Voltage | — | 208V, 3 Phase 50/60 Hz, 40 amps[4] |
| Oxygen Concentration | — | 10 ppm over background[4] |
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