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Comparison ledger

100R16versus96" Continuous

Strasbaugh 100R16, Strasbaugh 96" Continuous, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
100R16Strasbaugh
96" ContinuousStrasbaugh
OEMStrasbaughStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyStrasbaugh 100R16—
Specifications
type1 spindle grinder/polisher[1]—
drive systemDC drive system with 2 motors[1]—
spindle RPM1-180 RPM[1]—
eccentric RPM1-90 RPM[1]—
controlsdigital timer; air down switch; spindle and eccentric speed dials; air regulators[1]—
capacity16 inches[1]—
spindle size1-8 TPI[1]—
overall dimensions28 inches x 36 inches x 48 inches[1]—
weight500 lbs[1]—
originmade in the USA[1]—
OEM—Strasbaugh[2]
Model—96" Continuous[3]
Category—CMP[3]
Tool type—Continuous polisher[2]
Designation—96"[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]excelltechnology.comexcelltechnology.com
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com