Waferpedia

Comparison ledger

100R16versus6 Y 2

Strasbaugh 100R16, Strasbaugh 6 Y 2, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
100R16Strasbaugh
6 Y 2Strasbaugh
OEMStrasbaughStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyStrasbaugh 100R16Strasbaugh 6 Y 2
Specifications
type1 spindle grinder/polisher[1]—
drive systemDC drive system with 2 motors[1]—
spindle RPM1-180 RPM[1]—
eccentric RPM1-90 RPM[1]—
controlsdigital timer; air down switch; spindle and eccentric speed dials; air regulators[1]—
capacity16 inches[1]—
spindle size1-8 TPI[1]—
overall dimensions28 inches x 36 inches x 48 inches[1]—
weight500 lbs[1]—
originmade in the USA[1]—
Configuration—2 Stations[2]
Voltage—220V, 1 PH, 12 amp[2]
Category—CMP[3]
Tool type—Polisher[2]
Stations—2[2]
Capacity—16 inch[2]
Spindle speed—0-100 RPM[2]
Overarm speed—0-100 RPM[2]
Drive—3/4 HP Variable Speed Pulley Drive[2]
Pans—Round Aluminum Pans[2]
Electrical requirements—220V, 1 PH, 12 amp[2]

Plan your fab

Building a CMP process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]excelltechnology.comexcelltechnology.com
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com