Waferpedia

Comparison ledger

100R16versus6 DE DC 6

Strasbaugh 100R16, Strasbaugh 6 DE DC 6, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
100R16Strasbaugh
6 DE DC 6Strasbaugh
OEMStrasbaughStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyStrasbaugh 100R16Strasbaugh 6 DE DC 6
Cited variants—
Specifications
type1 spindle grinder/polisher[2]—
drive systemDC drive system with 2 motors[2]—
spindle RPM1-180 RPM[2]—
eccentric RPM1-90 RPM[2]—
controlsdigital timer; air down switch; spindle and eccentric speed dials; air regulators[2]—
capacity16 inches[2]—
spindle size1-8 TPI[2]—
overall dimensions28 inches x 36 inches x 48 inches[2]—
weight500 lbs[2]—
originmade in the USA[2]—
Configuration—Six Spindle[1]
Make—Strasbaugh[3]
Model—6 DE DC 6[4]
Type—Polisher[3]
Number of spindles—6[1]
Capacity—12 inch[1]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]excelltechnology.comexcelltechnology.com
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing