Waferpedia

Comparison ledger

R 208 FMC 2versus-Mist 850 Electronic Air Filter

Semitool R 208 FMC 2, Tri -Mist 850 Electronic Air Filter, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
R 208 FMC 2Semitool
OEMSemitoolTri
CategoryLab & Support EquipmentLab & Support Equipment
Wafer sizeSingle wafer—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySemitool R 208 FMC 2Tri -Mist 850 Electronic Air Filter
Specifications
Wafer sizeSingle wafer[1]—
ConfigurationDHF, NH4OH, H2O2, H2SO4, IPA[1]—
OSWindows NT[1]—

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing