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003163-000 SRDversusNS 300

Semitool 003163-000 SRD, Tokyo Electron NS 300, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
003163-000 SRDSemitool
NS 300Tokyo Electron
OEMSemitoolTokyo Electron
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySemitool 003163-000 SRDTokyo Electron NS 300
Specifications
MakeSemitool[1]Tel (Tokyo Electron)[6]
Model003163-000[1]NS 300[6]
Equipment typeSpin Rinse Dryer (SRD)[1]—
Asset #139375[1]—
Last Confirm DateSeptember 03, 2025[1]—
Vintage (example unit)—2006[2]
Equipment Type—Scrubber[6]
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Sources (6)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing
  6. [6]Equipment inventory listing