Comparison ledger
Semitool 003163-000 SRD, Semitool 8600 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 003163-000 SRDSemitool | 8600 SRDSemitool |
|---|---|---|
| OEM | Semitool | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool 003163-000 SRD | Semitool 8600 SRD |
| Specifications | ||
| Make | Semitool[1] | Semitool[2] |
| Model | 003163-000[1] | 8600[2] |
| Equipment type | Spin Rinse Dryer (SRD)[1] | — |
| Asset # | 139375[1] | — |
| Last Confirm Date | September 03, 2025[1] | — |
| Type | — | Spin Rinse Dryer[3] |
| Wafer Sizes | — | 4 inch[2] |
| Manufacturer | — | Semitool[3] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →