Waferpedia

Comparison ledger

SPW 813 Aversus1000FP

SCREEN SPW 813 A, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SPW 813 ASCREEN
OEMSCREENYES
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySCREEN SPW 813 AYES 1000FP
Specifications
Wafer Sizes8 inch[1]—
Product TypeScrubber[2]—
OEMSCREEN / DNS[4]—
ModelSPW 813 A[4]Glen/YES 1000FP[5]
Wafer size8 inch[4]—
Equipment typeScrubber[2]—
System type—Plasma cleaning system[5]
Line—R-Series Plasma Cleaning Systems (Glen Technologies)[5]
Designed use—Designed to accept a range of shelf sizes[5]
Application focus—Changing needs of the flat panel industry[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]semi-sps.comsemi-sps.com
  4. [4]Equipment inventory listing
  5. [5]web.archive.orgweb.archive.org