Comparison ledger
Plasma-Therm Shuttleline ICP, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Shuttleline ICPPlasma-Therm | 1512eTegal |
|---|---|---|
| OEM | Plasma-Therm | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Plasma-Therm Shuttleline ICP | Tegal 1512e |
| Specifications | ||
| Configuration | Etched III-V materials[1] | — |
| Wafer Size | 6 inch[1] | — |
| Etched Materials | III-V materials[1] | — |
| External pumps and chiller | Not included[1] | — |
| Tool type | Inductively coupled plasma etcher[1] | Industrial RIE plasma etcher system[3] |
| Process material | III-V materials[1] | — |
| Vacuum & pumping | External pumps and chiller not included[2] | — |
| Stated configuration | — | With modules assembly for CI-4222[3] |
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