Comparison ledger
Oxford Instruments 100 ICP Fluorine, SPTS Monarch Hydrofluoric (HF) Vapor, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 100 ICP FluorineOxford Instruments | |
|---|---|---|
| OEM | Oxford Instruments | SPTS |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Oxford Instruments 100 ICP Fluorine | SPTS Monarch Hydrofluoric (HF) Vapor |
| Specifications | ||
| Etch Gases | SF6, CF4, O2, Ar, N2, CHF3, C4F8[1] | — |
| Cryo DRIE etch rate | up to 5 µm/min[1] | — |
| Wafer size | 4 inch, 6 inch, 8 inch (with clamp change)[1] | — |
| Temperature | — | 35 C to 70 C[2] |
| Pressure | — | 50-250 Torr[2] |
| HF Flow Rates | — | 50 sccm-1000 sccm[2] |
| Ethanol Flow Rates | — | 0.1 to 1 ml/min[2] |
| Wafer Size | — | 8 inch[2] |
| Temperature Range | — | 35°C to 70°C[2] |
| Pressure Range | — | 50–250 Torr[2] |
| HF Flow Rate | — | 50–1000 sccm[2] |
| Ethanol Flow Rate | — | 0.1–1 ml/min[2] |
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