Comparison ledger
Oxford Instruments 100 ICP Fluorine, Plasma-Therm Shuttleline ICP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 100 ICP FluorineOxford Instruments | Shuttleline ICPPlasma-Therm |
|---|---|---|
| OEM | Oxford Instruments | Plasma-Therm |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Oxford Instruments 100 ICP Fluorine | Plasma-Therm Shuttleline ICP |
| Specifications | ||
| Etch Gases | SF6, CF4, O2, Ar, N2, CHF3, C4F8[1] | — |
| Cryo DRIE etch rate | up to 5 µm/min[1] | — |
| Wafer size | 4 inch, 6 inch, 8 inch (with clamp change)[1] | — |
| Configuration | — | Etched III-V materials[2] |
| Wafer Size | — | 6 inch[2] |
| Etched Materials | — | III-V materials[2] |
| External pumps and chiller | — | Not included[2] |
| Tool type | — | Inductively coupled plasma etcher[2] |
| Process material | — | III-V materials[2] |
| Vacuum & pumping | — | External pumps and chiller not included[3] |
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