Comparison ledger
Nordson March AP 600, Semitool 003163-000 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | March AP 600Nordson | 003163-000 SRDSemitool |
|---|---|---|
| OEM | Nordson | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Nordson March AP 600 | Semitool 003163-000 SRD |
| Specifications | ||
| Manufacturer | Nordson[1] | — |
| Model | AP 600[2] | 003163-000[4] |
| Type | Plasma Cleaner[2] | — |
| Category | Wet Processing / Clean[1] | — |
| Enclosure dimensions (W x D x H) | 569 x 869 x 704 mm (22 x 34 x 28 in.)[3] | — |
| Net weight | 221 kg (487 lbs)[3] | — |
| Chamber maximum volume | 50.4 liters (3076 in³)[3] | — |
| Number of electrode positions | 7[3] | — |
| RF power standard wattage | 600 W[3] | — |
| Frequency | 13.56 MHz[3] | — |
| Control system | EPC control with touchscreen interface[3] | — |
| Remote interface | PlasmaLINK, ProcessLINK[3] | — |
| Make | — | Semitool[4] |
| Equipment type | — | Spin Rinse Dryer (SRD)[4] |
| Asset # | — | 139375[4] |
| Last Confirm Date | — | September 03, 2025[4] |
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