Comparison ledger
Nikon 1505 G 6 E, Nikon NSR 2205 i 11 C i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1505 G 6 ENikon | |
|---|---|---|
| OEM | Nikon | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | 1988– | 2001– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Nikon 1505 | Nikon NSR 2205 |
| Specifications | ||
| Configuration | 5" reticle[1] | 0.40um[4] |
| Resolution | 650 nm[2] | 0.45um L&S[5] |
| Numerical Aperture | 0.54[2] | — |
| Reduction | 5x[2] | — |
| Exposure Field | 15 x 15 mm[2] | — |
| Alignment Accuracy | 130 nm[2] | — |
| Wafer Size | 4 inch[1] | 6 inch, 8 inch[4] |
| Light Source | g-line[3] | — |
| Introduction Year | 1988[2] | — |
| NA (Numerical Aperture) | 0.54[2] | — |
| Make | Nikon[1] | — |
| Model | 1505 G 6 E[1] | — |
| Category | Stepper[1] | — |
| Wafer Sizes | 4 inch[1] | — |
| Exposure type | g-line[2] | — |
| NA | 0.54[2] | — |
| Exposure field | 9.3 x 18.8 mm[2] | — |
| Total Focus Deviation | — | 0.45um L&S[5] |
| Astigmatism | — | 0.35um L&S[5] |
| Inclination | — | 0.40um[5] |
| Lens Distortion | — | 0.55um[5] |
| Mag Control Accuracy | — | 0.25um[5] |
| Focus Control Accuracy | — | 0.2um[5] |
| Resolution (L&S) | — | 0.45 µm[5] |
| Total Focus Deviation (L&S) | — | 0.45 µm[5] |
| Astigmatism (L&S) | — | 0.35 µm[5] |
| Magnification Control Accuracy | — | 0.25 µm[5] |
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