Waferpedia

Comparison ledger

1 WBS 1 Wafer SubstrateversusSB 6 GEN 2

Logitech 1 WBS 1 Wafer Substrate, SUSS MicroTec SB 6 GEN 2, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SB 6 GEN 2SUSS MicroTec
OEMLogitechSUSS MicroTec
CategoryPackaging & BondingPackaging & Bonding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLogitech 1 WBS 1 Wafer SubstrateSUSS MicroTec SB 6 GEN 2
Specifications
Wafer Size6 inch[1]—
Tool type—Substrate bonder[2]
Maximum wafer diameter—150 mm[2]
Substrate sizes—Pieces to 150 mm[2]
Minimum chamber vacuum—5 × 10-5 bar[2]
Maximum temperature—550 °C[2]
Maximum bonding force—20 kN[2]
Power supply for anodic bonding—2000 V, 60 mA[2]
Maximum thickness—9.99 mm[2]
Automation—Semi-automated[3]
Applications—MEMS, LED, packaging, 2.5D/3D integration[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]nist.govnist.gov
  3. [3]capneteq.comcapneteq.com