Comparison ledger
KLA P-15, Veeco Dektak, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | P-15KLA | DektakVeeco |
|---|---|---|
| OEM | KLA | Veeco |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 200mm | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA P-15 | Veeco Dektak |
| Specifications | ||
| Sample table | 200 mm sample table with vacuum[2] | — |
| Measurement range | Measures steps from 100 Å to 300 µm[2] | — |
| Maximum sample thickness | 20 mm[2] | 90 mm[5] |
| Minimum sample length | 25 mm[2] | — |
| Tool type | Profilometer[3] | — |
| Measurement capabilities | Measures roughness, waviness, step height, and other surface characteristics[4] | — |
| Wafer capability | Up to 8"/200mm wafer capable[4] | — |
| Control platform | Windows NT[4] | — |
| Software version | Profiler v6.41[4] | — |
| Automation | Computer controlled; automatic measurement capability[4] | — |
| Manufacturer | — | Veeco[1] |
| Model | — | DEKTAK 150[1] |
| Purpose | — | Stylus-based scanning system for measuring surface topography and thin film step heights[5] |
| Tip Size | — | 12 µm[1] |
| Standard Stylus Tip | — | 2.5 μm[5] |
| Scan Length | — | 55 - 200 mm[1] |
| Maximum Data Points per Scan | — | 120,000[1] |
| Maximum Sample Size | — | 200 mm[1] |
| Sample Diameter | — | up to 200 mm in diameter[5] |
| Sample Thickness | — | up to 90 mm thick[5] |
| Stylus Force | — | 1 - 15 mg[1] |
| X-Y Translation | — | 101.6 x 101.6 mm[5] |
| Stage Type | — | Two-axis, manual sample-positioning stage[5] |
| Stage Leveling and Rotation | — | Manual stage leveling and rotation[5] |
| Leveling | — | Two-point programmable or cursor software leveling[5] |
| Environmental Enclosure | — | Acrylic environmental enclosure[5] |
| X-Y translation range | — | 101.6 x 101.6 mm[5] |
| Long scan length | — | 55 mm[5] |
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