Waferpedia

Comparison ledger

.498 PSL WaferversusScientific FEI G 2 TEM

KLA .498 PSL Wafer, Thermo Fisher Scientific FEI G 2 TEM, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAThermo Fisher
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferThermo Fisher Scientific FEI G 2 TEM
Specifications
ConfigurationNIST Traceable[1]HAADF Detector[2]
NIST traceabilityYes[1]—
HAADF Detector—Included[2]
Gatan CCD Camera—Included[2]
E-rack #1—Included[2]
PCW console—Included[2]
HV Tank—Included[2]
EDAX—Included[2]
UPS—Included[2]
Power rack—Included[2]
Transformer—Included[2]
Pump—Included[2]
TEM Gun—Included[2]
Cabinets—Included[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing