Comparison ledger
KLA .498 PSL Wafer, Onto Innovation NSX 105 D Automated Wafer, Die & Bump, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NSX 105 D Automated Wafer, Die & BumpOnto Innovation | |
|---|---|---|
| OEM | KLA | Onto Innovation |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | Onto Innovation NSX 105 |
| Specifications | ||
| Configuration | NIST Traceable[1] | Single Phase + GND[2] |
| NIST traceability | Yes[1] | — |
| Full Load | — | 6 amps[3] |
| Largest load | — | 1.5 amps[3] |
| Power Configuration | — | Single Phase + GND[3] |
| Voltage | — | 200-240 Vac[3] |
| Frequency | — | 50/60 Hz[3] |
| Vintage | — | 2008[2] |
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