Waferpedia

Comparison ledger

.498 PSL WaferversusXTV 160

KLA .498 PSL Wafer, Nikon XTV 160, side by side. Every value shown is drawn from the cited encyclopedia entries.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
.498 PSL WaferKLA
XTV 160Nikon
OEMKLANikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2012 CT upgrade
Control system——
Generation——
FamilyKLA .498 PSL WaferNikon XTV 160
Specifications
ConfigurationNIST Traceable[1]CT upgrade[2]
NIST traceabilityYes[1]—
Imaging technology—X-ray; computed tomography (CT) upgrade[2]
.498 PSL Wafer entryXTV 160 entryAsk about these tools →Share experience with this comparison →

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing