Waferpedia

Comparison ledger

.498 PSL WaferversusLabophot 2

KLA .498 PSL Wafer, Nikon Labophot 2, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLANikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
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Lifecycle——
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Control system——
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FamilyKLA .498 PSL WaferNikon Labophot 2
Specifications
ConfigurationNIST Traceable[1]Polarizing[2]
NIST traceabilityYes[1]—
Optical System—Nikon CF optical system[3]
Illumination—6V-20W halogen lamp with Köhler illumination and variable control potentiometer[3]
Lamp (alternative)—6V-30W halogen bulb (Philips special type)[4]
Focusing (coarse)—12mm per rotation[4]
Focusing (fine)—0.1mm per rotation, each graduation 1 micron[4]
Objectives (standard)—E Plan 4/0.1 160/-, E Plan 10/0.25 LWD, E Plan 40/0.65 160/0.17 in a quintuple nosepiece[3]
Eyepieces (standard)—Two CFWN 10x/20[3]
Stage (standard)—Mechanical slide stage[3]
Condenser (standard)—Abbe 1.25 brightfield condenser[3]
Eyepiece tube inclination—30 degrees (Seidentoph design)[3]
Phase Contrast—Can use Green interference filter (GIF) for phase difference microscopy[4]
Illumination Type—6V-30W halogen bulb (special Philips type); Köhler illumination[4]
Lamp Power—6V, 20W (standard) or 6V-30W (replacement bulb)[3]
Nosepiece—Quintuple nosepiece; forward or rear facing[3]
Eyepieces (Oculars)—CFWN 10x/20 eyepieces (standard); 10X widefield adjustable eyepieces[3]
Objectives (standard configuration)—E Plan 4/0.1 160/-, E Plan 10/0.25 LWD, E Plan 40/0.65 160/0.17[3]
Objective Magnifications Available—4X, 10X, 20X, 40X, 50X, 100X[5]
Stage—Mechanical rectangular or circular rotatable with six minute vernier gradations; graded adjustable stage[3]
Focusing Movement—Coarse focus knob moves stage 12mm per rotation; fine focus knob moves stage 0.1mm per rotation (1 micron per graduation)[4]
Condenser Centering—Centering screws provided; quick-change condenser mount without re-adjusting centering screws[3]
Filter Holder—Quick-change filter holder (ND filter cassette, filter receptacle)[4]
Make—Nikon[2]
Model—Labophot 2[2]
Microscope type—Polarizing microscope[2]
Ocular lenses—10X ocular lenses[5]
Objectives—Five objective lenses: 100X, 50X, 40X, 10X, and 4X[5]
Head—Trinocular head with C-mount camera coupler[6]
Eyepieces—10X widefield adjustable eyepieces[6]
Fluorescence illuminator—Fluorescence vertical illuminator[6]
Lamp house—100 watt mercury lamphouse[6]
Power supply—100 watt mercury power supply[6]
Phase contrast condenser—Turret style phase contrast condenser with phase 1, 2, 3, darkfield, and brightfield stops[6]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]labwrench.comlabwrench.com
  4. [4]manualslib.commanualslib.com
  5. [5]medicalinst.commedicalinst.com
  6. [6]spachoptics.comspachoptics.com