Waferpedia

Comparison ledger

.498 PSL WaferversusX'Pert 3 MRD XL

KLA .498 PSL Wafer, Malvern Panalytical X'Pert 3 MRD XL, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
X'Pert 3 MRD XLMalvern Panalytical
OEMKLAMalvern Panalytical
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferMalvern Panalytical X'Pert 3 MRD XL
Specifications
ConfigurationNIST Traceable[1]50/60 Hz[2]
NIST traceabilityYes[1]—
Power—7 KVA[2]
Voltage—230 V[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing