Waferpedia

Comparison ledger

.496 PSL WaferversusNT 8000 Optical

KLA .496 PSL Wafer, Veeco NT 8000 Optical, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAVeeco
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run—2005–
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .496 PSL WaferVeeco NT 8000 Optical
Specifications
ConfigurationNIST Traceable[1]—
Wafer size8 inch[1]—
TraceabilityNIST Traceable[1]—
Compatible systemsCapable on Surfscan 6xy0 and SP1[1]—
CategoryMetrology & Inspection[2]—
Stage—8 x 8 stage controlled by Galil 5-axis stage controller[3]
Computer—Nixsystem G5 computer running Windows 7[3]
Software—Vision 3.6 with advanced analysis, data storage testing and stitching[3]
Objectives—Motorized 4-place turret with 5x and 50x objectives[3]
Field of view (FOV) lenses—Alignment lenses with magnifications of 0.55x, 1x, and 2x[3]
Isolation—Built-in TMC isolation stand[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]exapro.comexapro.com