Comparison ledger
KLA .496 PSL Wafer, Olympus MX 61, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MX 61Olympus | |
|---|---|---|
| OEM | KLA | Olympus |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Olympus MX 61 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | NIST Traceable[2] | High Power[4] |
| Wafer size | 8 inch[2] | — |
| Traceability | NIST Traceable[2] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[2] | — |
| Category | Metrology & Inspection[3] | — |
| OEM | — | Olympus[4] |
| Model | — | MX 61[4] |
| Equipment type | — | Microscope[4] |
| Description | — | High power[4] |
| Power | — | 50/60 Hz[4] |
| Current | — | 1.9/0.9 A[4] |
| Vendor model | — | MX61A[1] |
| Purpose | — | Semiconductor microscope for sample inspection and documentation[1] |
| Objectives | — | 5 X, 20 X, 50 X, 100 X and 150 X on motorized turret[1] |
| Stage focus | — | Motorized stage focus[1] |
| Digital imaging | — | Steam Motion software for calibrated measurements[1] |
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